A pressure sensor chip includes a diaphragm and pads. A flexible printed circuit board (FPC) includes a resin sheet having a through-hole and wiring patterns that are formed within the resin sheet and sealed. The resin sheet is press-fitted to the pressure sensor chip such that the diaphragm is bared at the through-hole. The wiring patterns are connected to the pads, and junctions between the wiring patterns and the pads are sealed with the resin sheet.

An electric wire insertion hole (41) arranged in a housing (4), an ventilation path of inside space (422) of which one end is opened to a pressure sensor internal space (7) and an intersection portion (421) communicating the both each other are provided. Since the electric wire insertion hole (41) and the intersection (421) intersect at right angles, water or dust entering into the electric wire insertion hole (41) does not enter a lot into the intersection (421). Therefore, water or dust hardly...

An adapter (2) disposed between joint (1) and diaphragm (3) includes an axis portion (21) and a flange (22) projecting radially from the axis portion (21). The axis portion (21) is arranged so that one end thereof does not interfere with the joint (1) and the other end is welded to the diaphragm (3), and the joint (1) is caulked to a peripheral edge of the flange (22). Since the diaphragm (3) is not directly joined to the joint (1), welding is not performed near the joint (1), but can be perform...

A pressure sensor comprises a housing having a pressure introduction hole, a pressure detecting element formed of a semiconductor device having the piezoelectric resistance effect, a holder for fixing the pressure detecting element, and a connector case. The pressure detecting element and the holder are airtightly joined to form a pressure sensor body in which an interior space is defined. A circuit board having an electrode pad is provided on the holder of the pressure sensor body, and a connec...

This invention relates to a pressure sensor comprising a diaphragm and at least one measuring element, which is situated on the diaphragm while serving to measure a deflection of the diaphragm. A holding element is placed on at least one surface of the diaphragm in order to accommodate a seal element, whereby this holding element has a through hole, which faces the diaphragm surface while having a cross-section that corresponds to the outer contour of a seal element to be accommodated.

A pressure sensor (1) includes a diaphragm (21) with a bottom formed of a thin-wall portion (210) and a pressure introducing joint (10), in which an austenitic precipitation hardening Fe--Ni heat resisting steel having high mechanical strength is used for the diaphragm (21), while an austenitic stainless steel that is relatively inexpensive is used for the pressure introducing joint (10). The diaphragm (21) and the pressure introducing joint (10) are integrated by welding, and Ni content of a we...

A pressure sensor includes a silicon-on-insulator (SOI) substrate, a glass substrate bonded to the SOI substrate by anode bonding, a silicon island formed on a part of a silicon layer of the SOI substrate and surrounded by a groove extending to an insulating layer of the SOI substrate, a through hole formed in the glass substrate, and an output electrode that is made of a conductive material, is disposed inside the through hole, and is electrically connected to an electrode formed on the glass s...

The pressure sensor of the invention, with an internal hydraulic system for pressure transfer, has a seal enabling an exact fill volume for the hydraulic system. The pressure sensor includes: a platform; at least one separating membrane, which, with the platform, encloses a pressure chamber; a hydraulic path inside the platform, which communicates with the pressure chamber; a platform blind hole in a surface of the platform, with, extending from the end of the platform blind hole, a canal, which...

A pressure sensor having a measuring cell (1) and sensor electronics (13) connected with the measuring cell (1), wherein the sensor electronics (13) and its electrical connections are protected from external influences, wherein on front side of the measuring cell (1) a pressure sensitive element is arranged, on which a pressure (p) acts during operation, and wherein the sensor electronics is arranged on a rear side of the measuring cell (1). The sensor has connected with the measuring cell (1) a...

A pressure sensor has a sensing unit and a pressure transmitting rod housed in a case, and a pressure receiving diaphragm. The case has a sensing unit housing portion and a pipe portion that extends from the sensing unit housing portion in a form of a pipe. The pipe portion includes an inner pipe and an outer pipe. The inner pipe is arranged inside the outer pipe and fixed to the outer pipe. The pipe portion has the first end located adjacent to the sensing unit and the second end away from the ...