The processing apparatus prevents difficulty in separation of the substrate from the base because of charges on the substrate when the substrate is lifted from the base for substrate placing during processing. The processing apparatus comprises pins to lift up the substrate on the base and a neutralization apparatus to discharge ionized gas to the gap between the bottom of the substrate lifted from the base by the pins and the top of the base. When ionized gas is discharged to the substrate and ...

A pretreatment chamber 120 is disposed within a vacuum transfer chamber 102 of a processing apparatus 100. The pretreatment chamber 120 is equipped with an orienting mechanism 128 and a UV lamp 124. The orienting mechanism 128 orients a wafer W through rotation of a table 130, on which the wafer W is placed, and by use of an optical sensor 134. Synchronously with the orientation, the UV lamp 124 emits UV through a UV transmission window 126 fitted to a ceiling portion of the pretreatment chamber...

A method of operating a digital signal processor is provided. The digital signal processor may be provided as a radio communication mobile station, a radio communication base station apparatus, or a CDMA radio communication system. Each path metric PM1 and PM0 of an old state is added to each branch metric BM1 and BM0 separately. A path metric of a new state N is formed by comparing the value of PM1+BM1 to the value of PM0+BM0. A path metric of a new state N+2.sup.k-2 is formed by comparing the ...

One of the disclosed processing apparatus includes a processing vessel having an inner processing space defined by a ceiling portion, a bottom portion, and side walls and capable of being evacuated to a predetermined vacuum, a mounting table which has a first mounting surface for mounting the object thereon and a second mounting surface facing an opposite side to which the first mounting surface faces, which is supported by the ceiling portion of the processing vessel, and which extends toward t...

A processing apparatus is provided for cleaning a wafer W. In the apparatus, a carbonated solution in the form of mist is ejected onto the wafer W through a nozzle 41, so that the film of carbonated solution, i.e., a conductive liquid film is formed on the wafer W. Next, a pure water highly pressurized by a jet pump 47 is ejected on the wafer W for cleaning it. The film of carbonated solution prevents devices built on the wafer W from being broken electrostatically. A liquid passage 52 from a su...

A method and apparatus for processing a first (e.g. half-tone) image constituted by a second (e.g. continuous tone) image convolved with a periodic (screen) function, to produce the second image is described. The invention is particularly suited to handling digitally represented half-tone images. The apparatus comprises a microcomputer (17) for determining digital data defining a frequency filter characteristic adapted to suppress the frequency or frequencies of the periodic function. A fast Fou...

Certain eating qualities of meat items, particularly poultry, are improved by injecting therein quantities of an edible emulsion having a melting point between about 76.degree.-110.degree. F. and a relatively narrow plastic range, such as is obtained by emulsifying a minor amount of water with a major amount of vegetable oil product comprised preferably of a lauric acid oil or mixtures of lauric oil and other oils or fats and/or hydrogenated forms and mixtures thereof, using a small amount of a ...

When forming a metallization layer in integrated-circuit semiconductor device fabrication, metal such as tungsten, for example, adheres poorly to a dielectric such as, e.g., silicon oxide, and tends to flake off from wafer areas not covered by a glue layer. Processing of the invention prevents such flaking by, first, removing the dielectric from the back side, edge, and "clip-mark" areas of the wafer and, second, depositing a glue layer on remaining dielectric on the face of the wafer. Removal o...

Tobacco material having a reduced protein content is provided by first extracting water soluble components from tobacco. The extracted residue then is subjected to enzyme treatment using an enzyme which can decompose water insoluble protein molecules to smaller sized water soluble molecular components. The enzyme treated extracted tobacco material then is isolated. The extracted tobacco components then are subjected to ultrafiltration treatment, and the extracted tobacco components having the hi...

A method and apparatus for locating and withdrawing the free unwinding end of yarn from a bobbin randomly wound, rewinding a portion of the free end about the body of yarn with the remainder of the free end deposited on the bobbin for retention thereon until subsequent retrieval and withdrawal of the free end. Rewinding the end of yarn facilitates initial over end withdrawal of the yarn from the bobbin during subsequent unwinding, as at an automatic winding machine. The bobbin is telescoped onto...