
A quartz holder for supporting silicon wafers having one or more helical quartz springs for gripping and two elongate quartz rods positioned parallel to each other and parallel to the axis of the spring for assisting in supporting the wafers. Two rods parallel to and positioned against the outside of the spring for supporting the spring and a suppressor rod positioned parallel to the axis of the spring and interiorly of and through the spring for holding the spring in place while the wafers are ...











