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A quartz holder for supporting silicon wafers having one or more helical quartz springs for gripping and two elongate quartz rods positioned parallel to each other and parallel to the axis of the spring for assisting in supporting the wafers. Two rods parallel to and positioned against the outside of the spring for supporting the spring and a suppressor rod positioned parallel to the axis of the spring and interiorly of and through the spring for holding the spring in place while the wafers are ...
An electric, resistance element heater utilizes quartz as a sheath material and has a resistance (heating) element that is in intimate, substantially continuous contact with a surface of the quartz. This allows the heater to operate in any one or all of the three modes of heat transfer, namely, radiation, conduction and convection. Such intimate, substantially continuous contact of the resistance element is achieved by applying the element in direct contact with the quartz surface. This is accom...
The apparatus for preparing quartz micropipettes includes a pair of carriers mounted on a linear ball bearing guide which grasp opposite ends of a quartz glass capillary tube. A pair of miniature torches fueled by a mixture of oxygen and propane simultaneously heat a portion of the center of the capillary tube and an inverted U-shaped bar disposed between the torches in propinquity to the capillary tube. A cable having one end attached to one of the carriers and the other end attached to the cor...
The invention relates to a synthetic quartz glass preform which is produced according to the flame hydrolysis technique with subsequent cooling and is suitable for the application of high-energy DUV radiation in the wave length range under 250 nm. Said preform has a core area which contains .gtoreq.1150 ppm OH, a strain double refraction of .ltoreq.5 nm/cm and a resistance to high-energy DUV radiation as a result of a transmission reduction of .DELTA. T .ltoreq.0.1 %/cm thickness. The quartz gla...
Described herein is a process chamber with a substantially all-quartz interior surface. The preferred embodiments have upper and lower walls being curved in both the x-z and y-z planes. In one embodiment, the chamber has thin upper and lower dome walls made from a generally transparent material such as quartz, each with a convex exterior surface and a concave interior surface. These walls are joined at their side edges to a cylindrical side wall, preferably formed from a generally translucent ma...
A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, a...
A generic clock with a mechanically driven display, a standard quartz movement and a microcontroller which is programmed to turn mechanically driven features such as clock hands and counters "on" and "off" during prescribed intervals of time. A large number of novel derivative clocks can be produced by merely re-programming the microcontroller and making simple revisions to the mechanically driven display. During each tick of the clock, a set of instructions to the microcontoller pulses a steppe...
An infra-red lamp consists of a quartz tubular envelope sealed at each end with a respective pinch seal. A tungsten filament supported within the envelope is electrically connected, via a molybdenum foil strip and lead wires within the pinch seal to a connector for connection to a power supply. Each pinch seal is substantially wholly enclosed within a ceramic housing, which is preferably provided with a locating flange, to protect the pinch seal in part from heat emitted by the filament and to a...
A mounting is provided for a GT-cut, coupled mode piezoelectric resonator. The mount includes pedestals with recesses. Portions of the resonator are mounted in the recesses.
Quartz glass component having a coating with a silicon carbide surface includes a gradient layer of silicon carbide and at least one additional constituent which is less hard and has a lower modulus of elasticity than silicon carbide and whose concentration decreases across the thickness of the layer from inside to outside. The coated component has good thermal-shock resistance and long-term stability in terms of its chemical resistance to hydrofluoric acid and nitric acid as well as to a mixtur...
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