An ion source equipped with an ion beam exit slit for extracting ions from plasma generated in feed gas introduced into a discharge chamber, and with gas inlet or inlets for introducing the feed gas into the discharge chamber in close proximity of the ion beam exit slit. Ion extraction can be made stably without any deposit on the ion beam exit slit even when a boron halide is used as the feed gas. The effect of the ion source can be further enhanced by adding oxygen, hydrogen or gas of an oxyge...

An improved radiation source is disclosed, exploiting the spontaneous radiation generated from the interaction of an electron beam and a conductive grating. Conditions are defined for generating coherent or noncoherent radiation, and for extending the tunability of the radiation source from millimeter, IR, visible and UV wavelengths to x-ray wavelengths, and for generating multiple wavelengths simultaneously. Conditions are disclosed for enhancing the intensity of the spontaneous radiation, anf ...

An ion beam for use in fabrication and processing of semiconductors, thin films or the like. For making uniform the radial distribution of an ion beam extracted from the ion source, a plasma chamber is formed by extending a plasma producing chamber in the direction in which microwave energy is introduced. The plasma chamber thus formed is provided with second magnetic means for generating a magnetic field of multicusp geometry.

An apparatus for the generation of an inductively excited ion or plasma source includes an amplification system and a high frequency excitation coil which are coupled to form a self-starting free-running excitation oscillator.

An ion source includes a partial flow generator for generating particle flow including atoms or molecules, a laser beam generator for generating a laser beam with one or a plurality of wavelengths which irradiates the whole or one part of the atoms or molecules in the particle flow near an exhaust nozzle of the particle flow generator, a pair of electrodes for applyinig an electric field over one part or the whole of the particle flow in the downstream region of the region irradiated with the la...

An ion source comprising a discharge chamber that has a gas inlet and an ion exit, two pairs of cathodes that are disposed on the side surfaces of said discharge chamber, two pairs of anodes, each anode being disposed in a space between the adjacent cathodes, and a pair of solenoids that are wrapped around one pair of cathodes so as to be mutually repulsive magnetically, wherein there is no magnetic field in the central axis of the other pair of cathodes around which no solenoids are wrapped.

An EHD ion source includes an extractor and a control electrode with extractor being disposed below a tip of an electrode, and functioning to apply an electric field to a substance to-be-ionized wetting a pointed end of the tip, so as to derive ions from the pointed tip end. The control electrode is disposed in the vicinity of the pointed end of the tip, and it functions to apply an electric field to the substance to-be-ionized in its molten state so as to supply the pointed tip end with the sub...

The present invention provides an ion source comprising an ion-generating chamber and an anode formed of multi-capillary for sending high-density atoms or molecules to be ionized into the ion-generating chamber in a constant direction.

Light source for providing light to fibre optic medical instruments and the like, source including dual lamps for alternate use and an efficient cooling system.

An impedance-matching circuit utilizing a field-effect transistor connected to a solid-state amplifying device. A resistive feedback path is provided from the output of the amplifying device to the input of the field-effect transistor and its value, together with the value of the biasing resistors, are chosen such that the input impedance to the circuit is determined almost entirely by the input impedance of the field-effect transistor. The value of these resistors are also selected such that th...