
According to the present invention, when power is supplied from a high frequency power supply to an antenna 14, a quasi-electrostatic induced electric field E.sub.PS is generated in a chamber 11, and plasma P of high density is generated over a broad area. Further, an alternating current (frequency: several tens Hz to several tens KHz) flows in polyphase AC magnets 17 by a polyphase AC inverter power supply, whereby a horizontal magnetic field (magnetic flux density B) is generated on a semicond...











